منابع مشابه
The Set-Valued Run-to-Run Controller with Ellipsoid Approximation
In order to successfully apply Run-to-Run (RtR) control or real time control in a semiconductor process, it is very important to estimate the process model. Traditional semiconductor process control methods neglect the importance of robustness due to the estimation methods they use. A new approach, namely the set-valued RtR controller with ellipsoid approximation, is proposed to estimate the pr...
متن کاملThe Set-Valued Run-to-Run Controller in Semiconductor Manufacturing Processes
In semiconductor manufacturing, run-to-run (RtR) control is paid more and more attention. In this paper a set-valued RtR control scheme is introduced. Di erent from conventional RtR control methods, the set-valued method rst calculates the feasible parameter set at the beginning of each run, then estimates the model parameters within this set. Compared to other RtR control schemes, it does not ...
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Genome-wide association studies (GWAS) facilitate largescale identification of genomic variants that are associated with complex traits. However, susceptibility loci identified by GWAS so far generally account for a limited fraction of the genotypic variation in patient populations. Predictive models based on identified loci also have modest success in risk assessment and therefore are of limit...
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ژورنال
عنوان ژورنال: Nature
سال: 2010
ISSN: 0028-0836,1476-4687
DOI: 10.1038/465673a